| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid ejection head manufacturing method in which pressure chambers are arranged with high density and high accuracy, and also which is capable of ejecting ink of a high viscosity. <P>SOLUTION: The method includes: a step of forming a flat piezoelectric member where a plurality of pressure chambers 307 communicating from a first side surface to a second side surface for ejecting liquid from an opening of the side of the first side surface are arranged at intervals in the longitudinal direction of a first side surface; a step of forming a first electrode 309 at an inner wall surface of the plurality of pressure chambers 307; a step of forming a level difference 609 on one side of a pair of main surfaces of the flat piezoelectric member; a step of forming a comb-shaped piezoelectric member in which the plurality of pressure chambers 307 acting independently of each other are extended from the level difference 609 by cutting between the pressure chambers 307 in the piezoelectric member forming the level difference 609 from the first side surface to the level difference 609; a step of laminating the plurality of comb-shaped piezoelectric member with each other, which are bonded at a second region; and a step of forming a second electrode 310 on the external surfaces of the plurality of comb-shaped piezoelectric member bonded at the second region. <P>COPYRIGHT: (C)2012,JPO&INPIT |
