| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a CVD apparatus of solution vaporization type capable of preventing any clogging of a spray nozzle and any re-solidification of a raw material. <P>SOLUTION: The CVD apparatus is provided with a vaporizer having a vaporization chamber of a hollow multi-stage cylindrical shape with both ends thereof being closed, an introducing unit for introducing a raw material solution by a spray nozzle into the vaporization chamber, an exhaust unit for exhausting the raw material gas vaporized in the vaporization chamber via an exhaust port, and a heater provided on an outer circumference of the vaporization chamber to heat the vaporization chamber. The vaporization chamber consists of a first cylindrical part having the first inside diameter with a fore end of the spray nozzle being located therein, and a second cylindrical part connected to a lower section of the first cylindrical part, and having the second inside diameter larger than the first inside diameter. The exhaust port of the exhaust unit is located on a side surface of the second cylindrical part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
