| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resin peeling device capable of easily peeling a cured resin covering one surface of a work. <P>SOLUTION: In the resin peeling device which peels off a cured resin film R sticking to the surface of a disc-like work W from the work W, the cured resin film R is sticking to the surface of the work W while projecting from the whole circumference at the edge of the work W. The resin peeling device has a holding part 10a in which a holding surface 10h for suction holding the rear surface of the work W is formed, and an external force imparting part 10b for imparting an external force from the rear surface toward the surface of the work W at a place of the cured resin film R sticking to the work W held on the holding part 10a and projecting from the edge of the work W. <P>COPYRIGHT: (C)2012,JPO&INPIT |
