发明名称 |
Workpiece holder for polishing, workpiece polishing apparatus and polishing method |
摘要 |
A workpiece holder for polishing includes a workpiece holder body having multiple perforated holes to hold a workpiece by vacuum suction. A holding surface of the workpiece holder body may be coated with resin. A coefficient of thermal expansion of the resin coating on the holding surface may be 1×10−5/K or less. The resin coating on the holding surface may be epoxy resin filled with silica particles.
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申请公布号 |
US8268114(B2) |
申请公布日期 |
2012.09.18 |
申请号 |
US20040490480 |
申请日期 |
2004.03.23 |
申请人 |
MASUMURA HISASHI;SUZUKI FUMIO;KITAGAWA KOUJI;SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
MASUMURA HISASHI;SUZUKI FUMIO;KITAGAWA KOUJI |
分类号 |
H01L21/68;B24B37/04;B24B37/30;B24B41/06;H01L21/304 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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