| 摘要 |
<P>PROBLEM TO BE SOLVED: To produce a larger output in an oscillation device that has a piezoelectric element as an oscillation source. <P>SOLUTION: An oscillation device includes a vibrating film 10, a piezoelectric element 20, and a support frame (holding member) 40. The piezoelectric element 20 is provided on the vibrating film 10. The support frame 40 holds an edge of the vibrating film 10. At least in a portion of the vibrating film 10 attached to the support frame 40, longitudinal elasticity modulus in a thickness direction is more than twice as large as that in an in-plane direction. Thus, vibrational energy originating in the piezoelectric element 20 is prevented from being propagated in the in-plane direction through the vibrating film 10. As a result, the vibrating film 10 has a large amplitude. <P>COPYRIGHT: (C)2013,JPO&INPIT |
