| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent breaking of a bonding wire due to flow of a sealing member. <P>SOLUTION: A pressure sensor seals a junction between a sensor chip 2 and a bonding wire 35 with a gel sealing member 36. A wall 23 is provided between a diaphragm part 21 and the sealing member 36. Since the wall 23 blocks movement of the sealing member 36 to the diaphragm part 21 side until the sealing member 36 is cured, the diaphragm part 21 is kept out of the sealing member. Accordingly, even when a differential pressure applied to the sensor chip 2 increases and the diaphragm part 21 comes into contact with a stopper 121, no sealing member 36 flows. Thus, the bonding wire 35 is prevented from being loaded, and eventually the bonding wire 35 is prevented from breaking. <P>COPYRIGHT: (C)2013,JPO&INPIT |
