COMPOUND, RADICAL POLYMERIZATION INITIATOR, METHOD FOR PRODUCING COMPOUND, POLYMER, RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a compound useful as a radical polymerization initiator; to provide a radical polymerization initiator comprising the compound; to provide a method for producing the compound; to provide a polymer useful for resist compositions; to provide a resist composition containing the polymer, and to provide a method for forming a resist pattern using the resist composition.

SOLUTION: The compound represented by formula (I), [wherein, R1is a 1-10C hydrocarbon group; Z is a 1-10C hydrocarbon group or cyano; R1and Z may be bound to each other to form a ring; X is a divalent connection group, and has one of -O-C(=O)-, -NH-C(=O)- and -NH-C(=NH)- at a terminal contacting with Q; R2is a single bond, an alkylene which may have one or more substituents, or an arylene group which may have one or more substituents; q and r are each independently 0 or 1; and A+is a metal cation or an organic cation].

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