发明名称 MEMS RESONATOR
摘要 A MEMS resonator has a resonator mass in the form of a closed ring anchored at points around the ring. A set of ring comb electrode arrangements is fixed to the ring at locations between the anchor points, to couple the input (drive) and output (sense) signals to/from the resonator mass.
申请公布号 US2013009716(A1) 申请公布日期 2013.01.10
申请号 US201213537303 申请日期 2012.06.29
申请人 NXP B.V.;PHAN LE KIM 发明人 PHAN LE KIM
分类号 H03K3/02 主分类号 H03K3/02
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