| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position detector which facilitates detection by increasing the amount of light from a mark used for alignment, and to provide an imprint device using the same. <P>SOLUTION: The position detector comprises an illumination optical system performing oblique incidence illumination of a first grating having periods in a first direction and a second direction different from the first direction, and a second grating having a period in the second direction that is different from the period of the first grating in the second direction, and a detection optical system which detects the diffraction light from the first and second gratings. The position detector detects the relative position in the second direction of the first and second gratings on the basis of the diffraction light thus detected. The illumination optical system illuminates, in the first direction, with light having a plurality of poles on the pupil surface. <P>COPYRIGHT: (C)2013,JPO&INPIT |
