PLASMA PROCESSING APPARATUS, MICROWAVE INTRODUCTION DEVICE, AND PLASMA PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a microwave plasma processing apparatus that is not always required to have a microwave introduction mechanism over a processing container, and has high flexibility in device design.

SOLUTION: A microwave introduction device 5 includes a microwave output part 50 which generates a microwave and also distributes and outputs the microwave to a plurality of paths, an antenna unit 60 which guides the microwave output from the microwave output part 50 into a processing container 2, and a microwave radiation module 80 which radiates the microwave introduced by the antenna unit 60 in the processing container 2. The microwave radiation module 80 has a microwave transmission plate 81 as a dielectric window member and a cover member 82 as a conductor member. The cover member 82 restricts the direction of the microwave so that the microwave introduced into the processing container 2 through the microwave transmission plate 81 travels toward a wafer W.

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