发明名称 MACHINING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a machining device with a novel structure for meeting a need of further miniaturizing the machining device itself. <P>SOLUTION: The machining device includes: a holding means for holding a workpiece; a machining means for machining the workpiece held by the holding means; and a frame that supports the holding means and includes a cavity therein or a frame that supports the machining means and includes a cavity therein. Piping or wiring for supplying a fluid or current to a requiring part of the machining device is installed in the cavity of the frame. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013078816(A) 申请公布日期 2013.05.02
申请号 JP20110219373 申请日期 2011.10.03
申请人 DISCO CORP 发明人 YAMANAKA SATOSHI;TAKADA NOBUYUKI;RIKIISHI TOSHIYASU
分类号 B24B41/02;B24B7/00;H01L21/304 主分类号 B24B41/02
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