发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device that eliminates the need for an operation to blow away cutting water sticking on a reverse surface of a dicing tape with an air gun when a workpiece is carried out from a chuck table.SOLUTION: There is provided a cutting device including a chuck table, cutting means of supporting a cutting blade rotatably, cutting water supply means, positioning means of positioning the chuck table in a carry-in/out region and a cutting region, and an openable/closable safety cover partitioning off the carry-in/out region and an operator. Further, the cutting device includes wiper means 52 disposed on a workpiece movement path in the carry-in/out region where the operator separates the workpiece from the chuck table, and having a water absorption member 34 wipes cutting water sticking on a reverse surface side of the workpiece, the safety cover has a press portion for pressing a water adsorption member during closure, and the water absorption member 34 is so positioned that the cutting water absorbed by the pressing when the safety cover is closed is suitably pressed out and the pressing is canceled when the safety cover is opened.
申请公布号 JP2013201181(A) 申请公布日期 2013.10.03
申请号 JP20120067360 申请日期 2012.03.23
申请人 DISCO ABRASIVE SYST LTD 发明人 HANASHIMA SATOSHI;FUKAZAWA TAKASHI
分类号 H01L21/301 主分类号 H01L21/301
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