| 摘要 |
PROBLEM TO BE SOLVED: To maintain performance of a motor, in its turn, suction performance of a pump means, by cooling the motor.SOLUTION: A vacuum pump 1 includes a pump means 2 for compressing and discharging gas sucked in from a suction port 11b from an exhaust port 12b, and a motor 3 for driving this pump means. A housing 4 is arranged for storing a stator core 22 as a motor casing of the motor, a cooling passage Sc is formed between an outer surface of the stator core and an inner surface of the housing, and the motor is cooled by making the gas discharged from the exhaust port of the pump means flow to the cooling passage. |
