| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of acquiring a high-resolution image of an inspection object without increasing cost and extending processing time, and when a command for enlarged display of a part of an appearance image of the inspection object, which is to be used as a map for displaying a fluoroscopic inspection position, is given, capable of performing enlarged display by using the high-resolution image.SOLUTION: An optical camera 6 is arranged close to an X-ray detector 2, and in a fluoroscopic inspection, a movement/stop state of an observation stage 3 and its position are monitored. When determining that the observation state 3 is in a stop state and an appearance image of high magnification can be photographed by the optical camera 6, the inspection object is automatically photographed and stored in storage means 13. When an enlarged display command of a specification area of an appearance image for displaying an observation position is given and appearance image data stored in the storage means 13 exists in the area, an enlarged image is constructed by preferentially using the data and an accurate enlarged image is displayed to easily observe fine components and a fine structure on the inspection object. |
