Low loss optical apertures are provided. A silicon intermediate layer sandwiched between a metal aperture layer and a dielectric layer has been found to offer a good combination of low optical loss combined with superior mechanical properties.
申请公布号
US2014042606(A1)
申请公布日期
2014.02.13
申请号
US201313758829
申请日期
2013.02.04
申请人
JUNIOR UNIVERSITY THE BOARD OF TRUSTEES OF THE LELAND STANFORD