蒸镀源，蒸镀装置，有机薄膜的成膜方法,申请号TW097106851-传众专利搜索

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发明名称	蒸镀源，蒸镀装置，有机薄膜的成膜方法
摘要
申请公布号	TWI428459	申请公布日期	2014.03.01
申请号	TW097106851	申请日期	2008.02.27
申请人	爱发科股份有限公司日本	发明人	根岸敏夫
分类号	C23C14/24;C23C14/12	主分类号	C23C14/24
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	日本

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