发明名称
摘要 A polishing composition that allows polishing speed to be increased and surface roughness to be reduced is provided. The polishing composition according to the present invention includes a compound including at least an oxyethylene group or an oxypropylene group in a block polyether represented by the following general formula (1), a basic compound, and abrasives: >N—R—N< (1) where R represents an alkylene group expressed as CnH2n and“n”is an integer not less than 1.
申请公布号 JP5505987(B2) 申请公布日期 2014.05.28
申请号 JP20100519838 申请日期 2009.07.13
申请人 发明人
分类号 C09K3/14;B24B37/00;H01L21/304 主分类号 C09K3/14
代理机构 代理人
主权项
地址