发明名称
摘要 A measuring method that includes holding a specimen to be measured on a flat-plate periodic structure, applying a linearly-polarized electromagnetic wave to the flat-plate periodic structure, detecting the electromagnetic wave scattered forward or backward by the flat-plate periodic structure, and measuring characteristics of the specimen on the basis of a phenomenon that a dip waveform appearing in a frequency characteristic of the forward-scattered electromagnetic wave or a peak waveform appearing in a frequency characteristic of the backward-scattered electromagnetic wave is changed with the presence of the specimen. The flat-plate periodic structure is a flat-plate structure in which at least two voids penetrating through the structure in a direction perpendicular to a principal surface thereof are periodically arrayed in at least one direction on the principal surface, and the electromagnetic wave is applied to the principal surface of the flat-plate periodic structure from the direction perpendicular to the principal surface.
申请公布号 JP5516589(B2) 申请公布日期 2014.06.11
申请号 JP20110529857 申请日期 2010.08.04
申请人 发明人
分类号 G01N21/3581;G01N21/01 主分类号 G01N21/3581
代理机构 代理人
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