SEMICONDUCTOR OPTICAL ELEMENT, METHOD FOR MANUFACTURING THE SAME, AND INTEGRATED SEMICONDUCTOR OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor optical element, a method for manufacturing the semiconductor optical element, and an integrated semiconductor optical element including the semiconductor optical element.SOLUTION: A semiconductor optical element 100 includes: an optical waveguide of a mesa structure, including an active layer comprising an Al-containing first semiconductor material and having a tapered part having a width becoming broader toward the output direction of light; and window structure parts 5, 6 formed on a side of a light output end face of the optical waveguide, and comprising a second semiconductor material having a band gap wavelength shorter than the wavelength of the light. A method for manufacturing the semiconductor optical element includes: a mesa structure formation step of forming a semiconductor laminate including an active layer comprising an Al-containing first semiconductor material in an optical wavelength of a mesa structure having a tapered part having a width becoming broader toward the output direction of light; and a window structure part formation step of forming a window structure part comprising a second semiconductor material having a band gap wavelength shorter than the wavelength of the light, on a side of a light output end face of the optical waveguide.