| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a gate valve capable of remarkably reducing particles and a discharge gas generated in operating the gate valve, and a chamber including the same.SOLUTION: A gate valve 1 opens and closes an opening portion 7 by operating a seal unit 4 by a linear actuator 10 incorporated between a seal plate 8 and a back plate 9. When a buffer member 17 disposed at an upper portion of the back plate 9 is joined with an upper stopper 14 disposed on the chamber 6 by receiving reaction force in pressing the seal plate 8 to a seal face 12, a valve rod 2 connected to the back plate 9 is elastically deformed into the bow shape, thus a surface pressure and impact force in joining can be reduced.</p> |
