发明名称 ELECTROLYTIC TREATMENT METHOD AND ELECTROLYTIC TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To effectively and properly perform prescribed treatment to a workpiece, using object ions in a treatment liquid.SOLUTION: A direct electrode 20 and a counter electrode 22 are arranged so that a plating liquid M is sandwiched. An indirect electrode 21 forming an electric field in the plating liquid M is inextricably arranged to the direct electrode 20. By continuously applying a DC voltage between the indirect electrode 21 and the counter electrode 22, copper ions C in the plating liquid M are transferred to the side of the counter electrode 22. By applying a pulse voltage between the direct electrode 20 and the counter electrode 22, the copper ions C transferred to the side of the counter electrode 22 are reduced.
申请公布号 JP2015004124(A) 申请公布日期 2015.01.08
申请号 JP20140001465 申请日期 2014.01.08
申请人 KUMAMOTO UNIV ; TOKYO ELECTRON LTD 发明人 AKIYAMA SHUSUKE ; IWAZU HARUO
分类号 C25D21/00;C25D17/10;C25D21/12 主分类号 C25D21/00
代理机构 代理人
主权项
地址