| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating agent for pattern microfabrication, with which a resist pattern can be favorably microfabricated and a microfabricated pattern with suppressed variations of a CD (critical dimension) can be formed, and to provide a method for forming a fine pattern by using the above coating agent for pattern microfabrication.SOLUTION: The coating agent for pattern microfabrication comprises (A) a water-soluble polymer, in which the following compound is blended as (B) a nitrogen-containing compound: the compound has an alkyl group having 8 or more carbon atoms and bonded to a nitrogen atom, in which 4 moles or more of ethylene oxide and/or propylene oxide are added to 1 mole of the nitrogen atom where the alkyl group is bonded. |
