| 摘要 |
PURPOSE:To commonly use a loader and an unloader device to reduce the number of rotary shafts to aim at miniaturizing at a thin piece introduction and delivery device and at reducing the cost thereof, by extending a conveying belt in an unloader device in a cassette storage section, to a wafer introduction section in a buffer cassette. CONSTITUTION:Wafers in a storage cassette 1 are set on an idler pulley 15b and a first conveyer belt 14a for conveyance,and are then shifted onto a second conveyer belt 14b for conveying the same into a buffer section. When the wafers are not stopped in the buffer section, they are shifted from an idler pulley 15a onto a a conveyer belt 8b in a conveying device 8 to be fed into the next process station. When they are stopped in the buffer section, they are stored in a buffer cassette 2, and the moved upward by a predetermined pitch for stand-by. With this arrangement in which the loader device in the cassette storage section and the unloader device in the buffer device are commonly used, the number of rotary shafts may be reduced, thereby it is possible to aim at miniaturizing the device and at reducing the manufacturing cost thereof.
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