| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint apparatus and an imprint method, by which probability of occurrence of a pattern defect can be determined prior to curing an imprint resin in an imprint process using an imprint mold, and breakage of the imprint mold due to the presence of a foreign substance can be prevented.SOLUTION: The imprint apparatus includes: a mold holder that holds an imprint mold having a fine concavo-convex pattern formed in a pattern region on a main surface side of a base material; a support pedestal that supports a transfer target substrate the surface of which is coated with an imprint resin to be subjected to transferring of the fine concavo-convex pattern; an imaging unit that can take an image of the imprint resin wetting and spreading on the transfer target substrate, from a position opposing to the main surface of the imprint mold; and a control unit that determines whether or not the imprint resin is to be cured, based on an image showing the wetting and spreading behavior of the imprint resin taken by the imaging unit. |
