CHARGED-PARTICLE BEAM SYSTEM AND OPERATIONAL METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a charged-particle beam system that generates stable noble gas field ion beams.SOLUTION: The charged-particle beam system includes a noble gas field ion beam source, a charged-particle beam column and a housing defining a first vacuum region 10 and a second vacuum region 70. The noble gas field ion beam source is disposed inside the first vacuum region. A first mechanical vacuum pump 60 is connected with the first vacuum region, and an ion getter pump 56 is connected with the charged-particle beam column. A gas supply system is connected with the first vacuum region 10, and noble gas is supplied to the noble gas field ion beam source.