| 摘要 |
PROBLEM TO BE SOLVED: To provide an image sensor, or the like, having reduced readout frequency of charges, without increasing the number of masks and the number of exposure times required in a stepping projection alignment system.SOLUTION: The image sensor includes a plurality of circuit units having the same wiring patterns and arrayed in a horizontal direction. The circuit unit includes: a photoelectric conversion device; a charge transfer device for transferring charges from the photoelectric conversion device in the horizontal direction according to a transfer clock; and a plurality of wirings arrayed in a vertical direction, for transmitting the transfer clock to the charge transfer device. The charge transfer device is selectively connected to two sets of charge readout units for reading out the charges from the charge transfer device through the wirings. At least a part of the plurality of wirings in a first circuit unit displaces to the vertical direction, so as to be connected to wirings of an adjacent second circuit unit. |
