发明名称 ACCOMMODATION CASSETTE
摘要 An accommodation cassette including: a plurality of rear accommodating grooves that are formed at least in the laterally central area of the inner surface of a rear wall connecting the rear edges of right and left side walls and extend laterally and parallel to each other at vertical spacings in such a manner as to be associated with right and left accommodating grooves.
申请公布号 US2015027971(A1) 申请公布日期 2015.01.29
申请号 US201414515284 申请日期 2014.10.15
申请人 Disco Corporation 发明人 INOUE Takaaki
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
主权项 1. A combination of an accommodation cassette and at least one frame unit seated within the accommodation cassette, the combination comprising: the frame unit comprising a frame including a circular opening therein, an attachment tape positioned within the circular opening of the frame and a wafer attached to the attachment tape; the accommodation cassette comprising: a right side wall;a left side wall provided parallel to the right side wall;a rear wall adapted to connect the rear edges of the right and left side walls, wherein the rear wall connects to the right and left side walls at right angles;a plurality of right accommodating grooves that are formed on the inner surface of the right side wall and extend longitudinally and parallel to each other at vertical spacings;a plurality of left accommodating grooves that are formed on the inner surface of the left side wall and extend longitudinally and parallel to each other at the vertical spacings in such a manner as to be associated with the right accommodating grooves; anda plurality of rear accommodating grooves that are formed at least in the laterally central area of the inner surface of the rear wall and extend laterally and parallel to each other at the vertical spacings in such a manner as to be associated with the right and left accommodating grooves, wherein the right accommodating grooves, the left accommodating grooves, and the rear accommodating grooves each receive the frame of the frame unit.
地址 Tokyo JP