发明名称 ELECTRONIC DEVICE AND MANUFACTURING METHOD FOR SAME
摘要 In manufacturing an electronic device in which a semiconductor chip (10), in which a device layer (11) has been formed on the surface of a substrate (1), and a heat sink (20), which radiates heat of the semiconductor chip (10), are connected via a heat spreader, a first heat spreader (2) is formed using first carbon nanotubes (14) on the rear face of the semiconductor chip (10), a second heat spreader (4) is formed using second carbon nanotubes (23) on the heat sink (20), and the first heat spreader (2) and the second heat spreader (4) are adhered together. By way of the configuration, an electronic device of high reliability which is of a relatively simple configuration, of extremely low thermal resistance, and which achieves efficient heat radiation is achieved.
申请公布号 WO2015011849(A1) 申请公布日期 2015.01.29
申请号 WO2013JP83585 申请日期 2013.12.16
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY 发明人 SATO, MOTONOBU
分类号 H01L23/373 主分类号 H01L23/373
代理机构 代理人
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