发明名称 COMPOSITE END EFFECTORS
摘要 <p>An end effector includes a base, a plurality of fingers extending from the base, and a plurality of pads disposed on each of said fingers to support a substrate. The fingers comprise a carbon fiber material and taper from a first diameter and first wall thickness proximate said base to a second diameter smaller than said first diameter and second wall thickness smaller than said first wall thickness distal said base. A method includes adhering a plurality of pads along a plurality of tapered fingers, and adhering proximal ends of the plurality of tapered fingers with corresponding recesses of a base. The assembled pads, tapered fingers and base are placed on a fixture such that top surfaces of the plurality of pads rest on a top surface of the fixture and the assembly is held in place on the fixture until the adhesive has cured at room temperature.</p>
申请公布号 WO2014164966(A9) 申请公布日期 2015.01.29
申请号 WO2014US23955 申请日期 2014.03.12
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 PERGANDE, PAUL E.;FORDERHASE, PAUL
分类号 H01L21/677;H01L21/68 主分类号 H01L21/677
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