IMPRINT APPARATUS AND IMPRINT METHOD, AND METHOD FOR MANUFACTURING ARTICLE BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an imprint apparatus that can suppress generation of an unfilled part with a resin in a concavo-convex pattern of a die and is advantageous for improving a throughput.SOLUTION: The imprint apparatus is configured to apply a resin (droplets 32) to a plurality of portions on a substrate, to bring the resin into contact with a die, and to transfer a concavo-convex pattern formed in the die onto the resin. The imprint apparatus includes: a control unit that sets a main axis direction 31 in accordance with the concavo-convex pattern and determines an application position of the resin based on the set main axis direction 31 in such a manner that a distanceαbetween resin droplets applied as spaced in the main axis direction 31 is larger than a distanceβbetween the resin droplets applied as spaced in a direction orthogonal to the main axis direction 31; and an application unit that applies the resin based on the determined application position.