| 摘要 |
A static electricity distribution measurement device (1) according to the present invention measures the static electricity distribution of a measurement surface of an object under measurement (200), and is provided with: an array antenna (2) for receiving electric fields generated from a plurality of areas (211) on the measurement surface as a result of vibration; a vibration means (3) for vibrating the object under measurement (200) or the array antenna (2); a measurement means (4) for measuring at least one from among the intensity, frequency, and phase of the electric fields from each of the plurality of areas (211) received by the array antenna (2); a calculation means (5) for calculating the amount of static electricity of each of the plurality of areas (211) on the basis of the measurement results of the measurement means (4); and a drawing means (6) for drawing the static electricity distribution of the measurement surface on the basis of the amount of static electricity of each of the plurality of areas (211). The array antenna (2) has a plurality of antenna elements (21) corresponding to each of the plurality of areas (211). |
