发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION FOR PROJECTION EXPOSURE, PHOTOSENSITIVE ELEMENT, METHOD FOR FORMING RESIST PATTERN, PROCESS FOR PRODUCING PRINTED WIRING BOARD AND PROCESS FOR PRODUCING LEAD FRAME |
摘要 |
The purpose of the present invention is to provide a photosensitive resin composition which is to be subjected to projection exposure and which can form a resist pattern that exhibits excellent adhesion and resolution and that suffers from little scumming at the bottom of the resist. The present invention provides a photosensitive resin composition which is to be subjected to projection exposure and which comprises (A) a binder polymer, (B) a photopolymerizable compound having an ethylenically unsaturated bond, (C) a photopolymerization initiator and (D) a sensitizing dye, wherein the photo- polymerizable compound (B) having an ethylenically unsaturated bond contains both an (meth)acrylate compound having a skeleton resulting from dipentaerythritol and a compound represented by general formula (III). In general formula (III), R8,R9,R10 andR11 are each independently a hydrogen atom or methyl, X and Y are each independently ethylene or propylene, and p1, p2, q1 and q2 are each independently a number of 0 to 9 and satisfy the relationships: p1 + q1 ≥ 1; p2 + q2 ≥ 1; and p1 + q1 + p2 + q2 = 2 to 9. |
申请公布号 |
WO2015012272(A1) |
申请公布日期 |
2015.01.29 |
申请号 |
WO2014JP69353 |
申请日期 |
2014.07.22 |
申请人 |
HITACHI CHEMICAL COMPANY, LTD. |
发明人 |
KUME MASAKAZU;MUNAKATA MOMOKO |
分类号 |
G03F7/027;G03F7/004;G03F7/031;H05K3/06;H05K3/18 |
主分类号 |
G03F7/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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