| 摘要 |
An anode supporting unit of an ion beam source includes a first structure which supports an anode by passing through the body of the ion beam source, has a flow path to circulate a coolant in the anode, and is made of conductive materials to supply power to the anode, and a second structure which is made of insulation materials to prevent the first structure from being electrically connected to the body and surrounds the first structure. Therefore, the anode supporting unit cools the anode and electrically insulates the body from the anode. |
