| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus achieving space saving and capable of improving throughput of a processor.SOLUTION: A drive system for a transport apparatus includes: a frame having a joint; a plurality of permanent magnets 2700 connected to the frame; a plurality of stationary windings 2710 exposed to a field of at least one of the plurality of permanent magnets; a control system 2715 for energizing the stationary windings to provide magnetic force to the frame; and an arrangement of ferromagnetic components arranged approximately to at least one side of the frame and causing passive stabilization of lift, pitch and roll of a transport apparatus 22 independently of magnetic force provided by the stationary windings and applied in a lift direction of the transfer apparatus 22. In the transfer apparatus 22, the joint movably connects at least one joint part of the frame to another base part of the frame and at least one of the plurality of permanent magnets 2700 is connected to the joint part. |
