发明名称 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A nonvolatile memory device includes a substrate having active regions that are defined by an isolation layer and that have first sidewalls extending upward from the isolation layer, floating gates adjoining the first sidewalls of the active regions with a tunnel dielectric layer interposed between the active regions and the floating gates and extending upward from the substrate, an intergate dielectric layer disposed over the floating gates, and control gates disposed over the intergate dielectric layer.
申请公布号 US2015104924(A1) 申请公布日期 2015.04.16
申请号 US201414572464 申请日期 2014.12.16
申请人 SK hynix Inc. 发明人 LEE Nam-Jae;ARITOME Seiichi
分类号 H01L21/762;H01L29/66;H01L27/115 主分类号 H01L21/762
代理机构 代理人
主权项
地址 Gyeonggi-do KR