ACOUSTIC SENSOR

摘要

Disclosed are an acoustic sensor and a method for manufacturing the same. According to the present invention, the acoustic sensor comprises: a lower electrode pad which covers a first through hole of the acoustic sensor and is extended to the upper side of the substrate; a diaphragm pad which covers a side wall of a second through hole and is extended to the upper side of the substrate; a lower electrode which is provided on the acoustic chamber and connected to the lower electrode pad; and a diaphragm which is separated from the lower electrode on the upper side of the substrate and connected to the diaphragm pad.