| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technology that achieves stable optical scanning even when the size of beams is reduced.SOLUTION: A beam includes a torsion beam 11 functioning as a first metal beam and a torsion beam 12 functioning as a second metal beam, and the torsion beams 11 and 12 extend in parallel. The torsion beams 11 and 12 have the same shape and arranged symmetrically with respect to an axis of rotation L. Such a symmetrical arrangement is employed to facilitate the stabilization of the vibration of a vibration mirror 10, which corresponds to a vibration part. The torsion beams 11 and 12 are fixed to an insulating fixing member at one end, respectively. The torsion beams 11 and 12 are electrically connected with a first conductive member constituting a mass body 20 that constitutes at least a part of the vibration part at the other end, respectively. The mass body 20 is a vibrating body having mirrors 21 and 22 that function as mirror surfaces scanning light, and a magnet 41. The mass body 20 rotates and vibrates with an axis of rotation L as the center.</p> |
