主权项 |
1. A manufacturing method of chloropolysilane represented by Formula 1, comprising:
a first process of producing an activated copper catalyst from metallic silicon and metallic copper or a copper compound, wherein an amount of metallic elements other than silicon contained in the metallic silicon is 2% by mass or smaller with respect to a total mass of the metallic silicon, and among the metallic elements other than silicon, amounts of Al and Ti are 0.5% or smaller and 0.1% or smaller by mass, respectively, with respect to the total mass of the metallic silicon; and a second process of conducting chlorination reaction of metallic silicon under the existence of the activated copper catalyst;
SinCl2n+2 Formula 1,(where, n in Formula 1 is an integer of 2 or more). |