发明名称 |
SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To suppress deterioration of the electric characteristics of a transistor having an oxide semiconductor layer or of a semiconductor device comprising the transistor.SOLUTION: A silicon layer 112 is provided in a transistor 120 using an oxide semiconductor 108 as a channel layer so as to be in contact with a surface of the oxide semiconductor layer. The silicon layer is provided so as to be in contact with at least a region of the oxide semiconductor layer in which a channel is formed. A source electrode layer 116a and a drain electrode layer 116b are provided in a region of the oxide semiconductor layer in which the silicon layer is not provided. |
申请公布号 |
JP2015181171(A) |
申请公布日期 |
2015.10.15 |
申请号 |
JP20150088059 |
申请日期 |
2015.04.23 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
SAKATA JUNICHIRO;GOTO HIROMITSU;SHIMAZU TAKASHI |
分类号 |
H01L21/336;G02F1/1368;H01L29/786;H01L51/50;H05B33/14 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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