发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress deterioration of the electric characteristics of a transistor having an oxide semiconductor layer or of a semiconductor device comprising the transistor.SOLUTION: A silicon layer 112 is provided in a transistor 120 using an oxide semiconductor 108 as a channel layer so as to be in contact with a surface of the oxide semiconductor layer. The silicon layer is provided so as to be in contact with at least a region of the oxide semiconductor layer in which a channel is formed. A source electrode layer 116a and a drain electrode layer 116b are provided in a region of the oxide semiconductor layer in which the silicon layer is not provided.
申请公布号 JP2015181171(A) 申请公布日期 2015.10.15
申请号 JP20150088059 申请日期 2015.04.23
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 SAKATA JUNICHIRO;GOTO HIROMITSU;SHIMAZU TAKASHI
分类号 H01L21/336;G02F1/1368;H01L29/786;H01L51/50;H05B33/14 主分类号 H01L21/336
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