发明名称 VIBRATION ELEMENT, ELECTRONIC APPARATUS, AND MOBILE ENTITY
摘要 PROBLEM TO BE SOLVED: To provide a vibration element in which the accuracy of detecting a physical quantity is improved.SOLUTION: A vibration element 1 comprises a mass body which, when two axes orthogonal to each other are assumed to be a first axis and a second axis and an axis orthogonal to a plane that includes the first axis and the second axis is assumed to be a third axis, includes a support part 130 and a first displacement part 110 and a second displacement part 120 that are rotatably connected to the support part 130 via beam parts 115, 125 centering around the first axis and extending so as to be along the direction of the second axis, the first displacement part 110 and second displacement part 120 being such that free ends 112, 122 provided at one and the other side and facing each other are connected by a connection part 140.
申请公布号 JP2015184009(A) 申请公布日期 2015.10.22
申请号 JP20140057669 申请日期 2014.03.20
申请人 SEIKO EPSON CORP 发明人 TAKIZAWA TERUO
分类号 G01C19/5762;B81B3/00;G01C19/5747;H01L29/84 主分类号 G01C19/5762
代理机构 代理人
主权项
地址