发明名称 JIG FOR INSPECTION, AND CUTTING DEVICE AND METHOD
摘要 <p>PROBLEM TO BE SOLVED: To provide cutting device and method for accommodating electronic parts in pieces after an appearance inspection is executed on the electronic parts.SOLUTION: A cutting device has a dry table for adsorbing plural electronic parts 9, a suction pump intercommunicating with plural first suction paths provided to the dry table, drying means for drying the plural electronic parts 9 on the dry table, a temporarily holding mechanism for receiving and adsorbing the plural electronic parts 9 from the dry table, a plate 19 placed on the dry table, plural third suction paths 23 which are provided to the plate 19 and intercommunicates with the plural first suction paths under the state that the plate 19 is placed on the dry table, a lid 20 which is detachably placed on the plate 19, a screw 28 for fixing the plate 19 and the lid 20, and a housing box in which the plural electronic parts 9 are accommodated in pieces. A worker detaches the lid 20 from the plate 19, and inspects the plural electronic parts 9 with a microscope 15.</p>
申请公布号 JP2015188024(A) 申请公布日期 2015.10.29
申请号 JP20140065041 申请日期 2014.03.27
申请人 TOWA CORP 发明人 IZUMI YUYA
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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