发明名称 GRINDER
摘要 PROBLEM TO BE SOLVED: To provide a grinder which can perform an efficient grinding of a work-piece having a high hardness while reducing a wear amount of a grinding stone.SOLUTION: A grinder 1 is equipped with a chuck table 31 which holds a disk-shaped work-piece W, and a grinding unit 5 onto which a grinding wheel 51, in which grinding stones 52 that contact and grind the disk-shaped work-piece held by the chuck table are annularly disposed, is rotatably mounted. The grinder is so configured that during grinding of the disk-shaped work-piece, a grinding surface of a squeeze-out part of the grinding stone is irradiated with a laser beam from a laser radiation mechanism 6, while a surface to be ground of the disk-shaped work-piece, which is ground by the grinding stone, is irradiated with a laser beam.
申请公布号 JP2015199173(A) 申请公布日期 2015.11.12
申请号 JP20140080159 申请日期 2014.04.09
申请人 DISCO ABRASIVE SYST LTD 发明人 HIRATA KAZUYA
分类号 B24B53/00;B23K26/00;B23K26/067;B23K26/352;B24B7/04;B24B41/06;H01L21/304 主分类号 B24B53/00
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