发明名称 温調装置およびこれを適用したインプリント装置
摘要 <p>A temperature adjusting device that can heat and cool an object like a mold or a molding target uniformly and quickly, and an imprinting device using the same are provided. The temperature adjusting device is for adjusting a temperature of the object like a mold 100 or a molding target 200, and includes fluid supplying means 1 for supplying a fluid at a predetermined temperature from a plurality of supply openings 11, holding means 2 including a holding face 21 that holds the object, and a fluid receiving face 22 that receives the fluid supplied from the supply openings 11, a temperature adjusting housing 3 that constructs, together with the holding means 2, a temperature adjusting chamber 31 which retains thereinside the supply openings 11, and a discharging channel 4 that discharges the fluid in the temperature adjusting chamber 31.</p>
申请公布号 JP5816943(B2) 申请公布日期 2015.11.18
申请号 JP20110554301 申请日期 2011.07.20
申请人 发明人
分类号 B29C59/02;B29C33/02;H01L21/027 主分类号 B29C59/02
代理机构 代理人
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