| 发明名称 |
(GA) ZN SN OXIDE SPUTTERING TARGET |
| 摘要 |
A sputtering target having a one-piece top coat comprising a mixture of oxides of zinc, tin, and optionally gallium, characterized in that said one-piece top coat has a length of at least 80 cm; a method for forming such a sputtering target and the use of such a target for forming films. |
| 申请公布号 |
EP2953915(A1) |
申请公布日期 |
2015.12.16 |
| 申请号 |
EP20140702604 |
申请日期 |
2014.02.04 |
| 申请人 |
SOLERAS ADVANCED COATINGS BVBA |
发明人 |
OBERSTE BERGHAUS, JÖRG;DE BOSSCHER, WILMERT |
| 分类号 |
C04B35/453;C04B35/457;C23C4/14;C23C14/08;C23C14/34 |
主分类号 |
C04B35/453 |
| 代理机构 |
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代理人 |
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| 地址 |
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