| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing an aluminum nitride sintered body, which can achieve characteristics such as high thermal conductivity and high insulation by molding and firing an aluminum nitride powder formed by pulverizing an aluminum nitride block object obtained by a direct nitriding process, while using the powder containing fine powder generated during the pulverization as it is.SOLUTION: The method for producing an aluminum nitride sintered body is characterized in that an aluminum nitride block object obtained by a direct nitriding process is pulverized so that the resulting aluminum nitride powder has a volume-based cumulative 90% particle diameter of 5-9 μm and preferably has a specific surface area of ≥3.6 m/g, and then 3-7 mass% of a rare earth metal oxide and 100-500 ppm (expressed in terms of CaO) of a calcium-based compound are added as a sintering aid to the aluminum nitride powder without separating fine powder generated during the pulverization, and firing is carried out at a temperature of >1,700 to 1,800°C in a non-oxidizing atmosphere. |
