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发明名称
对于载具环上的晶圆的存在感知及位置修正;PRESENCE SENSING AND POSITION CORRECTION FOR WAFER ON A CARRIER RING
摘要
本发明之实施例包括用于判定由端效器支撑之载具环组件之位置的装置及系统。在一实施例中,藉由使载具环组件穿过复数个穿透光束感测器来判定载具环组件之位置。在载具环穿过感测器时,侦测到沿载具环组件上之点的复数个感测器转变。每一感测器转变指示穿透光束感测器中之一者自非阻塞状态变更至阻塞状态,或自阻塞状态变更至非阻塞状态。记录端效器在每一感测器转变处之位置,且将该位置与引起端效器位置被记录之感测器转变相关联。然后,根据复数个感测器转变及其关联的端效器位置来计算载具环组件之位置。
申请公布号
TW201546939
申请公布日期
2015.12.16
申请号
TW104115744
申请日期
2015.05.18
申请人
应用材料股份有限公司 APPLIED MATERIALS, INC.
发明人
玛索可约翰 MAZZOCCO, JOHN;格林博格丹尼尔 GREENBERG, DANIEL
分类号
H01L21/673(2006.01)
主分类号
H01L21/673(2006.01)
代理机构
代理人
蔡坤财李世章
主权项
地址
美国 US
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