Method of making interposer package for CMOS image sensor

摘要

An image sensor package and method of manufacture that includes a crystalline handler with conductive elements extending therethrough, an image sensor chip disposed in a cavity of the handler, and a transparent substrate disposed over the cavity and bonded to both the handler and image sensor chip. The transparent substrate includes conductive traces that electrically connect the sensor chip's contact pads to the handler's conductive elements, so that off-chip signaling is provided by the substrate's conductive traces and the handler's conductive elements.

主权项

1. A method of packaging a sensor chip that includes a substrate with front and back opposing surfaces, a plurality of photo detectors formed at the front surface, and a plurality of contact pads formed at the front surface which are electrically coupled to the photo detectors, the method comprising:
providing a conductive crystalline handler having opposing first and second surfaces; forming a cavity into the first surface; forming a plurality of conductive elements each extending from the first surface, through the crystalline handler, to the second surface, wherein for each of the conductive elements, a dielectric layer is disposed between the conductive element and the conductive crystalline handler; providing a substrate having opposing top and bottom surfaces, wherein the substrate is optically transparent to at least one range of light wavelengths; forming a plurality of electrically conductive traces on the bottom surface and insulated from the substrate by a compliant dielectric material that is disposed only between the plurality of electrically conductive traces and the bottom surface; inserting the sensor chip in the cavity; bonding the substrate to the crystalline handler and the sensor chip such that:
the substrate is disposed over the cavity,each of the contact pads is electrically connected to at least one of the electrically conductive traces by a first conductive pad disposed between and electrically connecting the contact pad and the at least one electrically conductive traces, andeach of the electrically conductive traces is electrically connected to at least one of the conductive elements by a second conductive pad disposed between and electrically connecting the electrically conductive trace and the at least one conductive element.