Semiconductor device having a capacitive element

摘要

The performances of a semiconductor device are improved. A semiconductor device has a first electrode and a dummy electrode formed apart from each other over a semiconductor substrate, a second electrode formed between the first electrode and the dummy electrode, at the circumferential side surface of the first electrode, and at the circumferential side surface of the dummy electrode, and a capacitive insulation film formed between the first electrode and the second electrode. The first electrode, the second electrode, and the capacitive insulation film form a capacitive element. Further, the semiconductor device has a first plug penetrating through the interlayer insulation film, and electrically coupled with the first electrode, and a second plug penetrating through the interlayer insulation film, and electrically coupled with the portion of the second electrode formed at the side surface of the dummy electrode opposite to the first electrode side.

主权项

1. A semiconductor device comprising:
a semiconductor substrate; a first electrode formed of a first conductive film formed over the semiconductor substrate; a first dummy electrode formed apart from the first electrode over the semiconductor substrate, and formed of a second conductive film at the same layer as the first conductive film; a second electrode formed of a third conductive film formed between the first electrode and the first dummy electrode, at the circumferential side surface of the first electrode, and at the circumferential side surface of the first dummy electrode; a first capacitive insulation film formed of a first insulation film formed between the first electrode and the second electrode; an interlayer insulation film formed in such a manner as to cover the first electrode, the second electrode, and the first capacitive insulation film; a first coupling hole penetrating through the interlayer insulation film, and reaching the first electrode; a second coupling hole penetrating through the interlayer insulation film, and reaching a first portion of the second electrode formed at a side surface of the first dummy electrode opposite to the first electrode side; a first coupling electrode formed of a fourth conductive film embedded in the first coupling hole, and electrically coupled with the first electrode; and a second coupling electrode formed of a fifth conductive film embedded in the second coupling hole, and electrically coupled with the first portion of the second electrode, wherein the first electrode, the second electrode, and the first capacitive insulation film form a first capacitive element.