BEAM STRUCTURE FOR ANGULAR VELOCITY/ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a beam structure for an angular velocity/acceleration sensor resisting to disturbance and having high sensitivity. SOLUTION: Bent head top parts of a double-supported ring-shaped plate spring type drive beam are linked to each other to suppress any detection modes other than a drive vibration mode, thereby enhancing the linearity of vibration when it is driven with a large amplitude. Plate springs are rotation- symmetrically disposed into a spiral form and used as a detection beam, thereby lowering disturbance sensitivity in directions other than a detection axis.