| 摘要 |
The present invention relates to a laminate peeling device. In regard to a laminate composing a first substrate and a second substrate which are attached together to be peelable, the laminate peeling device peels the laminate, in turn, along the direction of peeling progress from one end side to other end side of an interface of the first substrate and the second substrate and comprises: a supporting part which supports the first substrate of the laminate; a peeling unit including a first flexible member in a plate shape and an adsorption part which is equipped to be detachable on the first flexible member and adsorbs the second substrate of the laminate; and a driving part which transforms the peeling unit to warp, in turn, from the one end side to the other end side of the second substrate of the laminate. |
